SAN FRANCISCO, Calif. — July 9, 2014 — Solid State Technology and SEMI today announced the recipient of the 2014 “Best of West” Award — Nikon Corporation —for its NSR-S630D Immersion Scanner. The award recognizes important product and technology developments in the microelectronics supply chain. Held in conjunction with SEMICON West, the largest and most influential microelectronics exposition in North America, the Best of West finalists were selected based on their financial impact on the industry, engineering or scientific achievement, and/or societal impact.
The Nikon Corporation NSR-S630D ArF Immersion Scannerleverages the well-known Streamlign platform, incorporating further developments in stage, optics, and autofocus technology to deliver unprecedented mix-and-match overlay and focus control with sustained stability to enable the 10/7 nm node. The Nikon Corporation booth is in South Hall, Booth 1705.
The winning entry was entered in the “Wafer Processing Equipment” category.
The Best of West Award winner was announced during SEMICON West on Wednesday, July 9, 2014.
SEMI is the global industry association serving the nano- and micro-electronic manufacturing supply chains. Our 1,900 member companies are the engine of the future, enabling smarter, faster and more economical products that improve our lives. Since 1970, SEMI has been committed to helping members grow more profitably, create new markets and meet common industry challenges. SEMI maintains offices in Bangalore, Beijing, Berlin, Brussels, Grenoble, Hsinchu, Moscow, San Jose, Seoul, Shanghai, Singapore, Tokyo, and Washington, D.C. For more information, visit www.semi.org.
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